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Semiconductor Manufacturing

This course site features lecture notesandstudent final papers. Some lectures in this class are also offered though the MIT Singapore Alliance.6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; ...

Start Date: Feb 01, 2003 Topics: Design
Cost: Free

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Overview

Description

This course site features lecture notesandstudent final papers. Some lectures in this class are also offered though the MIT Singapore Alliance.6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.

Details

  • Dates: Feb 01, 2003 to May 25, 2003
  • Days of the Week: Monday, Tuesday, Wednesday, Thursday, Friday, Saturday, Sunday
  • Level of Difficulty: Beginner
  • Size: Massive Open Online Course
  • Instructor: Prof. Duane Boning
  • Cost: Free
  • Institution: MIT OCW
  • Topics: Design

Provider Overview

About MIT OCW: MIT OpenCourseWare (OCW) is a web-based publication of virtually all MIT course content. OCW is open and available to the world and is a permanent MIT activity.

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