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Design and Fabrication of Microelectromechanical Devices

6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realist...

Start Date: Feb 01, 2007 Topics: Design, General Engineering
Cost: Free

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Overview

Description

6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

Details

  • Dates: Feb 01, 2007 to May 25, 2007
  • Days of the Week: Monday, Tuesday, Wednesday, Thursday, Friday, Saturday, Sunday
  • Level of Difficulty: Beginner
  • Size: Massive Open Online Course
  • Instructors: Prof. Joel Voldman, Prof. Carol Livermore
  • Cost: Free
  • Institution: MIT OCW
  • Topics: Design, General Engineering

Provider Overview

About MIT OCW: MIT OpenCourseWare (OCW) is a web-based publication of virtually all MIT course content. OCW is open and available to the world and is a permanent MIT activity.

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