Physics of Microfabrication: Front End Processing's Full Profile
This course is offered to graduates and focuses on understanding the fundamental principles of the "front-end" processes used in the fabrication of devices for silicon integrated circuits. This includes advanced physical models and practical aspects of major processes, such as oxidation, diffusion, ion implantation, and epitaxy. Other topics covered include: high performance MOS and bipolar devices including ultra-thin gate oxides, implant-damage enhanced diffusion, advanced metrology, and new materials such as Silicon Germanium (SiGe).
Sep 01, 2004
to Dec 20, 2004
Days of the Week:
Monday, Tuesday, Wednesday, Thursday, Friday, Saturday, Sunday
- Level of Difficulty: Beginner
- Size: Massive Open Online Course
- Instructors: Prof. L. Rafael Reif, Prof. Judy Hoyt
- Cost: Free
- Institution: MIT OCW
- Topics: Physics
About MIT OCW:
MIT OpenCourseWare (OCW) is a web-based publication of virtually all MIT course content. OCW is open and available to the world and is a permanent MIT activity.
MIT OCW Offers Courses In:
Questions about Physics of Microfabrication: Front End Processing
Want more info about Physics of Microfabrication: Front End Processing?
Get free advice from education experts and Noodle community members.
MIT OpenCourseWare (MIT OCW) is an initiative of the Massachusetts Institute of Technology (MIT) to put all of the educational materials from its undergraduate- and graduate-level courses online, partly free and openly available to anyone, anywhere.